Surface-treatment of silicon carbide and its surface properties.
نویسندگان
چکیده
منابع مشابه
Sub-Surface Damage Removal in Fabrication & Polishing of Silicon Carbide
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ژورنال
عنوان ژورنال: Journal of the Society of Materials Science, Japan
سال: 1987
ISSN: 1880-7488,0514-5163
DOI: 10.2472/jsms.36.1176